Wafer Glamp Ring(Φ316.3x6.35t)LAM

Stepper Holder 8"(Φ200x10.5)CANON

Bolt.Nut,Washer, Auuu / Augment

Ring Filler Orifice(Φ350x37.1t)LAM

Ring(Φ280x25t) / Focus Ring(Φ350x20t)

Vacuum Chuck(canon) / Vacuum chuck(Nikon)

Sic & Si₃N4 제품류

Block & Insulator(Al₂0₃)

ZrO₂ 제품류

Lift Pin류(Al₂0₃)

Vacuum ARM(Al₂0₃96%) / Vacuum ARM(Al₂0₃96%)

Quartz Ring(Φ350)가공장면

BASE PLATE CVD-55K

CVD END EFFECTOR-10K

END EFFECTOR-25K

INSULATOR BLOCK-9th

MAIN SHAFT-55K

SIDE GOLF TEE-55KPX(8th)