HOME제품정보반도체장비부품



Wafer Glamp Ring(Φ316.3x6.35t)LAM Stepper Holder 8"(Φ200x10.5)CANON



Bolt.Nut,Washer, Auuu  Augment Ring Filler Orifice(Φ350x37.1t)LAM



Ring
(Φ280x25t) 
Focus Ring
(Φ350x20t)
Vacuum
Chuck(canon)
Vacuum
chuck(Nikon)



Sic & Si₃N4 제품류 Block & Insulator(Al₂0₃)



ZrO₂ 제품류 Lift Pin류(Al₂0₃)



Vacuum ARM
(Al₂0₃96%)
Vacuum ARM
(Al₂0₃96%)
Quartz Ring(Φ350)가공장면